Monolithic 3D integration of tantalum pentoxide photonics on arbitrary substrates

Abstract

The photonics landscape encompasses a wide scope of material platforms, each optimized for specific functionalities, yet no platform meets the demands of all current and evolving photonic applications. While combining integrated photonics materials enhances overall capability - such as unifying nonlinear optics, low-loss passive devices, and electro-optics - material and process compatibility remains a major challenge. We introduce full-wafer, monolithic 3D integration of tantalum pentoxide (Ta$_2$O$_5$, hereafter tantala) photonics onto arbitrary substrates, which we explore here with thin-film lithium niobate (LN) on silicon. Tantala's unique properties, importantly room-temperature deposition, low-temperature annealing, and low stress in thick films optimized for phase matching, make it well suited for monolithic 3D integration without compromising substrate performance or compatibility. We demonstrate low-loss, high-quality-factor microresonators and nanophotonics in tantala, robust quasi-phase-matching in poled LN waveguides, and efficient 3D interlayer routing. This enables us to demonstrate a rich palette of nonlinear frequency conversion processes, including $χ^{(3)}$ optical parametric oscillation (OPO) and soliton microcomb generation in tantala microresonators and photonic-crystal resonators, $χ^{(2)}$ second-harmonic generation (SHG) in periodically poled LN, and combinations thereof. Monolithic 3D integration with tantala opens a new paradigm for scalable, multifunctional photonic systems, enabling visible, near-IR, and nonlinear operation into existing photonic infrastructure.