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arXiv:0802.1848cond-mat.mes-hall

Fabrication of One-Dimensional Programmable-Height Nanostructures via Dynamic Stencil Deposition

J. L. Wasserman, K. Lucas, S. H. Lee, A. Ashton, C. D. Crowl, N. Markovic

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Abstract

Dynamic stencil deposition (DSD) techniques offer a variety of fabrication advantages not possible with traditional lithographic processing, such as the the ability to directly deposit nanostructures with programmable height profiles. However, DSD systems have not enjoyed widespread usage due to their complexity. We demonstrate a simple, low-profile, portable, one-dimensional nanotranslation system that facilitates access to nanoscale DSD abilities. Furthermore we show a variety of fabricated programmable-height nanostructures, including parallel arrays of such structures, and suggest other applications that exploit the unique capabilities of DSD fabrication methods.

arXiv comments
6 pages, 5 figures
Journal reference
DOI
doi:10.1063/1.2960573
Subjects
cond-mat.mes-hallMesoscale and Nanoscale Physics

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  1. NASA Moves Closer to Building a 3-D Printed Rocket Engine 1 comment

    • One nitpick - metal vapour deposition, when done in-situ through a moveable shadow mask, certainly is 3D printing. One can dynamically "draw" out structures having controlled variable-height profiles inside the vacuum chamber during the evaporation process by altering the…

      jeffwassView on HNParent context

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